In situ measurement via Band Edge, Blackbody, and Pyrometry, typically used in MBE, PLD, ALD, sputtering, and e-beam evaporation deposition environment.
Wafer and Film Temperature
kSA BandiT
kSA BandiT PV
In-line measurement via Band Edge, Blackbody, and Pyrometry, ideal for thin film photovoltaic metrology applications, including in-line production measurement.
kSA ICE
In situ modular tool for measurement via individual Emissivity Corrected Pyrometry (ECP), Blackbody, and/or Band Edge Modules, ideal for MOCVD reactors with either high speed or low speed rotation and limited optical access.
kSA SpectraTemp
In situ tool for measuring the absolute temperature of semiconductor wafers, metals, ceramics, MOCVD carriers, and much more. Can also be used to calibrate pyrometers and other blackbody-like sources.
kSA ScanningPyro
In Situ tool for creating high resolution, full temperature maps on Veeco K465i and EPIK700 wafer carriers and wafers. Greatly enhances the ability to perform process optimization.
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