MOCVD fabs often perform spot temperature measurements on wafer carriers to help tune the heater zones in an attempt to achieve uniform temperature profiles.

For reactors with slit style optical access, like Veeco K465i and EPIK700 MOCVD tools, the kSA ScanningPyro provides the ability to generate high resolution full temperature maps of wafer carriers and wafers, greatly enhancing the ability to perform process optimization.

The kSA ScanningPyro combines simultaneous temperature measurements from a dual scanning pyrometer head to map the entire wafer carrier, from center to outer edge, in under 2 minutes on Veeco K465i reactors. Users acquire wafer carrier maps, selectable line scans, and/or subsets of the full scan. Easily perform analysis with proprietary kSA software to identify problem areas. With this information in hand, users are better equipped to make process and hardware adjustments to improve product performance.